It is a system control device that can safely supply high-purity gas to semiconductor manufacturing facilities and prevent human errors by adjusting the high-pressure or low-pressure state of gas to the pressure required in the process and prevent leakage.

• Product name : Gas Supply System
• Application : A device that supplies a constant pressure and the correct flow rate of gas required for manufacturing facilities
• Primary supplier : Research institute, nanofabrication facilities, laboratory

Chemical Supply System is a system for supplying constant pressure in the correct flow rate to chemicals required for manufacturing processes such as semiconductors, LCDs, and LEDs manufacturing.

• Product name : Chemical Supply System
• Application : A device that supplies a constant pressure and the correct flow rate of chemicals required for manufacturing facilities
• Primary supplier : Research institute, nanofabrication facilities, laboratory

Gas treatment device that treats toxic gases emitted from the semiconductor manufacturing process. The scrubber can be applied to various processes and provides a clean manufacturing environment.

• Heat Wet : Toxic gas treatment by heating the temperature above the auto-ignition point using an electric heater.
• Burn Wet : Direct flame treatment and direct burning of toxic gas through LNG combustion
• Plasma : JET processing method at extremely high temperature using plasma

• Product name : Scrubber
• Application : It is a device that processes waste gas that is not consumed during the semiconductor manufacturing process. Heat Wet, Bun Wet, and Plasma methods are selected and used according to the amount of exhaust gas emitted.
• Primary supplier : Research institute, nanofabrication facilities, laboratory

Piping work that connects gas or chemicals used in processing equipment such as semiconductors, LCDs, LED labs, etc. to supply without leakage while maintaining high purity.

• Product name : Utility
• Application : Installation of piping works necessary for the smooth use of facilities and auxiliary devices used in semiconductors and high-tech products depending to the site
• Primary supplier : Research institute, nanofabrication facilities, laboratory